학술논문
Atomistic modeling of ion beam induced amorphization in silicon
Document Type
Conference Paper
Author
Source
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms . (Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, December 2005, 241(1-4):501-505)
Subject
Language
English
ISSN
0168583X