학술논문
Composition of Ge+ and Si+ implanted SiO2 /Si layers: Role of oxides in nanocluster formation
Document Type
Article
Author
Source
In: Journal of Non-Crystalline Solids . (Journal of Non-Crystalline Solids, 1 October 2008, 354(35-39):4363-4366)
Subject
Language
English
ISSN
00223093