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Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis

Document Type

Article

Author

Park, H.; Kim, J.; Cho, S.; Kim, K.; Jang, S.; Choi, Y.; Lee, H.

Source

In: Sensors. (Sensors, March 2024, 24(6))

Subject

Language

English

ISSN

14248220

Online Access

Full Text (ProQuest Central) Full Text (Gale Academic Onefile) Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

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