학술논문
New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon
Document Type
Conference Paper
Author
Source
In: Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA . (Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA, 1995, :135-139)
Subject
Language
English