학술논문
Cathodoluminescence evaluation of electrical stress condition of Si-SiO2 structures
Document Type
Conference Paper
Author
Source
In: Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA . (Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA, 1997, :270-274)
Subject
Language
English