학술논문
A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , MOEMS and Miniaturized Systems XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11697)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X