학술논문
PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1μm near infrared wavelength region
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Integrated Optics: Design, Devices, Systems, and Applications V. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 11031)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X