학술논문
EUVL compatible LER solutions using functional block copolymers
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Alternative Lithographic Technologies IV. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8323)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X