학술논문
Critical dimension measurement: from synchrotron Small Angle X-ray Scattering to industrial Optical Scatterometry techniques
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12496)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X