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Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

Document Type

Article

Author

Zozulia, A.; Nazarikov, G.; Pogoretskiy, V.; Williams, K.; Jiao, Y.; Bolk, J.; van Veldhoven, R.; Rihani, S.; Berry, G.

Source

In: Micro and Nano Engineering. (Micro and Nano Engineering, June 2024, 23)

Subject

Language

English

ISSN

25900072

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) Web of Science JCR 저널정보 Scopus Find it@PNU

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