학술논문
The Effects of Electrostatic Interactions on Abnormal Growth of Particles Deposited by Charged Nanoparticles During Chemical Vapor Deposition of Silicon
Document Type
Article
Author
Source
In: Electronic Materials Letters . (Electronic Materials Letters, March 2023, 19(2):218-228)
Subject
Language
English
ISSN
20936788
17388090
17388090