학술논문
The Mechanical and Tribological Properties of LaB6 Thin Films Deposited by Closed-Field Unbalanced Magnetron Sputtering
Document Type
Conference Paper
Author
Source
In: Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering - ICAMME 2022 . (Lecture Notes in Mechanical Engineering, 2023, :245-250)
Subject
Language
English
ISSN
21954364
21954356
21954356