학술논문
Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Document Type
Article
Author
Source
In: Physica Status Solidi - Rapid Research Letters . (Physica Status Solidi - Rapid Research Letters, July 2013, 7(7):457-460)
Subject
Language
English
ISSN
18626254
18626270
18626270