학술논문
Design space analysis of novel interconnect constructs for 22nm FDX technology
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Design-Process-Technology Co-optimization for Manufacturability XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10148)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X