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CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

Document Type

Article

Author

von Borany, J.; Engelmann, H.-J.; Heinig, K.-H.; Hlawacek, G.; Hübner, R.; Möller, W.; Amat, E.; Perez-Murano, F.; Pourteau, M.-L.; Rademaker, G.; Tiron, R.; Klüpfel, F.; Rommel, M.; Baier, L.; Pichler, P.

Source

In: Semiconductor Science and Technology. (Semiconductor Science and Technology, May 2023, 38(5))

Subject

Language

English

ISSN

13616641
02681242

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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