학술논문
Silatrane-Based Molecular Nanolayers as Efficient Diffusion Barriers for Cu/SiO2 /Si Heterojunctions: Implications for Integrated Circuit Manufacturing
Document Type
Article
Author
Source
In: ACS Applied Nano Materials . (ACS Applied Nano Materials, 8 March 2024, 7(5):4874-4885)
Subject
Language
English
ISSN
25740970