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Polysilicon nanowire NEMS fabricated at low temperature for above IC NEMS mass sensing applications
Document Type
Conference Paper
Author
Ouerghi, I.; Sansa, M.; Ludurczak, W.; Duraffourg, L.; Benedetto, K.; Besombes, P.; Gergaud, P.; Poulain, C.; Vidana, A.I.; Ladner, C.; Fabbri, J.M.; Muyard, D.; Rodriguez, G.; Rabille, G.; Pollet, O.; Brianceau, P.; Kerdiles, S.; Hentz, S.; Ernst, T.; Moffitt, T.; Adams, B.; Larmagnac, D.
Source
In: Technical Digest - International Electron Devices Meeting, IEDM, 2015 IEEE International Electron Devices Meeting, IEDM 2015. (Technical Digest - International Electron Devices Meeting, IEDM, 16 February 2015, 2016-February:18.3.1-18.3.4)
Subject
Language
English
ISSN
01631918

Online Access

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