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Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers

Document Type

Article

Author

Wan, D.; Couet, S.; Piao, X.; Souriau, L.; Canvel, Y.; Tsvetanova, D.; Vangoidsenhoven, D.; Thiam, A.; Pacco, A.; Potočnik, A.; Mongillo, M.; Ivanov, T.; Jussot, J.; Verjauw, J.; Acharya, R.; Lazzarino, F.; Govoreanu, B.; Radu, I.P.

Source

In: Japanese Journal of Applied Physics. (Japanese Journal of Applied Physics, May 2021, 60(SB))

Subject

Language

English

ISSN

13474065
00214922

Online Access

Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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