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Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry

Document Type

Article

Author

Amato, U.; Antoniadis, A.; De Feis, I.; Fazio, D.; Genua, C.; Pagano, D.; Tochino, G.; Vasquez, P.; Gijbels, I.; Granata, D.; La Magna, A.

Source

In: Sensors. (Sensors, July 2023, 23(14))

Subject

Language

English

ISSN

14248220

Online Access

EBSCOHost PDF Full Text (ProQuest Central) Full Text (Gale Academic Onefile) Web of Science JCR 저널정보 Scopus Find it@PNU

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