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Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

Document Type

Article

Author

Shi, Y.; Tsuji, M.; Cho, H.; Kim, J.; Hosono, H.; Ueda, S.

Source

In: ACS Nano. (ACS Nano, 2 April 2024, 18(13):9736-9745)

Subject

Language

English

ISSN

1936086X
19360851

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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