학술논문

157 nm resist materials: Progress report

Document Type

Article

Author

Brodsky, C.; Byers, J.; Conley, W.; Hung, R.; Yamada, S.; Patterson, K.; Somervell, M.; Trinque, B.; Tran, H.V.; Cho, S.; Chiba, T.; Lin, S.-H.; Jamieson, A.; Johnson, H.; Vander Heyden, T.; Willson, C.G.

Source

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, November-December 2000, 18(6):3396-3401)

Subject

Language

English

ISSN

10711023

Online Access

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