학술논문
Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4 C Target
Document Type
Article
Source
In: Journal of Superhard Materials . (Journal of Superhard Materials, 1 March 2019, 41(2):90-97)
Subject
Language
English
ISSN
19349408
10634576
10634576