학술논문
Towards electrical testable soi devices using directed self-assembly for fin formation
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Alternative Lithographic Technologies VI. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9049)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X