학술논문
Ultrafast laser singulation of optical circuits with optical quality end-facets
Document Type
Conference Paper
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 11991)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X