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Development of ultra-high-current implanter for material modification process in next era devices

Document Type

Article

Author

Kai, H.; Uchida, Y.; Kurauchi, T.; Tajiyoshi, M.; Takashima, D.; Nishimoto, H.; Oshurahunov, A.; Igarashi, Y.; Wada, R.; Kawakami, N.; Kuroi, T.; Sasaki, J.; Hamamoto, N.; Hahto, S.K.; Sacco, G.; Matsumoto, T.

Source

In: MRS Advances. (MRS Advances, December 2022, 7(36):1248-1252)

Subject

Language

English

ISSN

20598521

Online Access

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