학술논문
Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
Document Type
Article
Author
Source
In: Superconductor Science and Technology . (Superconductor Science and Technology, August 2021, 34(8))
Subject
Language
English
ISSN
13616668
09532048
09532048