학술논문
Fabrication of TiN coatings using superimposed HiPIMS and MF technique: Effect of target poisoning ratios and MF/HiPIMS pulse on-time ratio
Document Type
Article
Author
Source
In: Surface and Coatings Technology . (Surface and Coatings Technology, 29 February 2024, 478)
Subject
Language
English
ISSN
02578972