학술논문
Zero degree contour cutting below 100 μm feature size with femtosecond laser
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Laser-Based Micro-and Nanoprocessing X. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9736)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X