학술논문
The effect of ion implantation on structural damage in compositionally graded AlGaN layers
Document Type
Article
Author
Source
In: Semiconductor Physics, Quantum Electronics and Optoelectronics . (Semiconductor Physics, Quantum Electronics and Optoelectronics, 2019, 22(1):119-129)
Subject
Language
English
ISSN
16056582
15608034
15608034