학술논문
Enhanced remnant polarization in ferroelectric Hf0.5 Zr0.5 O2 thin film capacitors through Mo top electrode by post-metallization annealing treatment
Document Type
Article
Author
Source
In: Physica B: Condensed Matter . (Physica B: Condensed Matter, 15 July 2024, 685)
Subject
Language
English
ISSN
09214526