학술논문
Compact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application
Document Type
Article
Author
Source
In: Japanese Journal of Applied Physics . (Japanese Journal of Applied Physics, 1 March 2024, 63(3))
Subject
Language
English
ISSN
13474065
00214922
00214922