학술논문
Modelling of Surface Roughness for Glass-Assisted CO2 Laser Machined P-Type Silicon Wafer
Document Type
Conference Paper
Author
Source
In: AIP Conference Proceedings , 8th Brunei International Conference on Engineering and Technology 2021. (AIP Conference Proceedings, 10 January 2023, 2643)
Subject
Language
English
ISSN
15517616
0094243X
0094243X