학술논문
A model for calculating the thickness profile of TiB2 and Al multilayer coatings produced by planar magnetron sputtering
Document Type
Article
Author
Source
In: Surface and Coatings Technology , Proceedings of the 7th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 17-21, 2000. (Surface and Coatings Technology, July 2001, 142-144:934-938)
Subject
Language
English
ISSN
02578972