학술논문
The interface of atomic layer deposited ZrO2 on Si/SiO2 from an alkoxide zirconium precursor and ethanol: A transmission electron microscopy-focused study
Document Type
Article
Source
In: Surface and Interface Analysis . (Surface and Interface Analysis, August 2023, 55(8):638-643)
Subject
Language
English
ISSN
10969918
01422421
01422421