학술논문

Impact of the Crystal Structure of Interlayer on the Properties of Zr-Doped Hafnia-Based Ferroelectric Capacitor
Document Type
Article
Source
In: Physica Status Solidi (A) Applications and Materials Science. (Physica Status Solidi (A) Applications and Materials Science, May 2024, 221(9))
Subject
Language
English
ISSN
18626319
18626300