학술논문
Investigation of the effect of annealing on Si(100) substrate modified by Ga+ focused ion beam
Document Type
Conference Paper
Author
Source
In: Journal of Physics: Conference Series , 8th International School and Conference "Saint Petersburg OPEN 2021": Optoelectronics, Photonics, Engineering and Nanostructures, SPbOPEN 2021. (Journal of Physics: Conference Series, 6 December 2021, 2086(1))
Subject
Language
English
ISSN
17426596
17426588
17426588