학술논문
Closed-Loop Operation of a High-Q Silicon MEMS Quatrefoil Suspension Gyroscope
Document Type
Conference Paper
Author
Source
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2024, :895-898)
Subject
Language
English
ISSN
10846999