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Integrated silicon photonic MEMS

Document Type

Article

Author

Quack, N.; Takabayashi, A.Y.; Sattari, H.; Edinger, P.; Jo, G.; Bleiker, S.J.; Errando-Herranz, C.; Gylfason, K.B.; Niklaus, F.; Khan, U.; Bogaerts, W.; Verheyen, P.; Mallik, A.K.; Lee, J.S.; Jezzini, M.; Morrissey, P.; Antony, C.; O’Brien, P.

Source

In: Microsystems and Nanoengineering. (Microsystems and Nanoengineering, December 2023, 9(1))

Subject

Language

English

ISSN

20557434

Online Access

Full Text (ProQuest Central) Web of Science JCR 저널정보 Scopus Find it@PNU

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