학술논문
Mathematically describing the target contour in silicon such that model-based OPC can best realize design intent
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Design and Process Integration for Microelectronic Manufacturing II. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5379:214-223)
Subject
Language
English
ISSN
0277786X