학술논문
Scalable ferroelectricity of 20 nm-thick (Al0.8 Sc0.2 )N thin films sandwiched between TiN electrodes
Document Type
Article
Author
Source
In: Journal of Applied Physics . (Journal of Applied Physics, 7 December 2023, 134(21))
Subject
Language
English
ISSN
10897550
00218979
00218979