학술논문
Chemical shrinkage material: Nanoscale patterning through interpolymer complex
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, March 2006, 24(2):795-799)
Subject
Language
English
ISSN
10711023