학술논문
Stress-Assisted Thermal Diffusion Barrier Breakdown in Ion Beam Deposited Cu/W Nano-Multilayers on Si Substrate Observed by in Situ GISAXS and Transmission EDX
Document Type
Article
Source
In: ACS Applied Materials and Interfaces . (ACS Applied Materials and Interfaces, 10 February 2021, 13(5):6795-6804)
Subject
Language
English
ISSN
19448252
19448244
19448244