학술논문
Investigation of Ion Channeling and Scattering for Single-Ion Implantation with High Spatial Resolution
Document Type
Article
Author
Source
In: Physica Status Solidi (A) Applications and Materials Science . (Physica Status Solidi (A) Applications and Materials Science, 1 November 2019, 216(21))
Subject
Language
English
ISSN
18626319
18626300
18626300