학술논문
Origin of Voids at the SiO2 /SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
Document Type
Article
Author
Source
In: ECS Journal of Solid State Science and Technology . (ECS Journal of Solid State Science and Technology, March 2023, 12(3))
Subject
Language
English
ISSN
21628777
21628769
21628769