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Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O2 plasma densification

Document Type

Article

Author

Santo Domingo Peñaranda, J.; Minjauw, M.M.; Vandenbroucke, S.S.T.; Li, J.; Dendooven, J.; Detavernier, C.; Petit, R.

Source

In: Dalton Transactions. (Dalton Transactions, 25 April 2023, 52(21):7219-7224)

Subject

Language

English

ISSN

14779234
14779226

Online Access

Full Text (RSC Gold) Web of Science JCR 저널정보 Scopus Find it@PNU

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