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Mechatronic Spatial Atomic Layer Deposition for Closed-Loop and Customizable Process Control

Document Type

Article

Author

Penley, D.; Cho, T.H.; Brooks, A.J.; Ransohoff, L.; Park, H.; Herman, E.; Zhao, E.; Trejo, O.; Barton, K.; Dasgupta, N.P.

Source

In: Advanced Materials Technologies. (Advanced Materials Technologies, 18 April 2024, 9(8))

Subject

Language

English

ISSN

2365709X

Online Access

Full Text (Wiley Journals) Full Text (Wiley-DB) Web of Science JCR 저널정보 Scopus Find it@PNU

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