학술논문
Compositional, structural, and optical properties of atomic layer deposited tantalum oxide for optical fiber sensor overlays
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 May 2018, 36(3))
Subject
Language
English
ISSN
15208559
07342101
07342101