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Enabling precision coordinate metrology for universal optical testing and alignment applications

Document Type

Article

Author

Khreishi, M.; Ohl, R.G.; Howard, J.M.; Papa, J.C.; McClelland, R.; Hovis, C.; Hadjimichael, T.; Thompson, P.; Ranson, K.; Gorius, N.; Liang, R.

Source

In: Optical Engineering. (Optical Engineering, 1 March 2021, 60(3))

Subject

Language

English

ISSN

15602303
00913286

Online Access

Web of Science JCR 저널정보 Scopus Find it@PNU

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