학술논문

Improvement in Short-Channel Effects and Bias-Stress Stability of Vertical Thin-Film Transistors Using Atomic-Layer-Deposited In-Ga-Sn-O Channels
Document Type
Article
Source
In: ACS Applied Electronic Materials. (ACS Applied Electronic Materials, 26 December 2023, 5(12):6668-6676)
Subject
Language
English
ISSN
26376113