학술논문
Surface modified spin-on xerogel films as interlayer dielectrics
Document Type
Article
Source
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 1999, 17(1):205-212)
Subject
Language
English
ISSN
10711023